The use of Statistical Process Control is at the heart of the way we do our engineering work at MEMSRIGHT. It
provides the tools and methodology to make sure that our tools and facility are running correctly and that the product
that we run is in control and in specification.
MEMSRIGHT uses and records data in four areas:
Special device-like test vehicles and parametric test structures can be used to monitor fab process integration health or
to verify process improvement effects on integration:
Diaphragm Capacitor and Resonator Integration Test Vehicles
The basic business process used to use statistical process control are applied to run the activity.